ȸҰCOMPANY BUSINESS AREA ǰҰPRODUCT CUSTOMER äȳRECRUIT






Spray LBL (Layer-by-Layer)


Wafer Auto Spray Coater




Spray LBL (Layer-by-Layer) ν

è 3 Spray system, ߾ ڵ ε ε ý (б ⱸ е )

è 3 Spray system 6-Nozzle Spray LBL (Layer-by-Layer)







• ߽ Interface( ܼ)


• Control Display : PLC TOUCH 10ġ Digital Display


• Control Type : Manual & Auto Control


• LOADING & UNLOADING ý


• è 3 Spray system


• è 3 Spray system


• Heating Plate : (Temp. Range) +¡ ~ max. 450


• ʹ̷ кй , ڸ Coating


• ũ Ͽ л簡













1. Spray Nozzle

2. Liquid System



• ǽ 0.5mm

• Air ATOMIZING (̷ü)

• X,Y,Z Ϳ

• ҷ 뷮 й

• ̸ й ϸ ȿ

• nm ڸ

• Liquid : ũ








Air з (MPa)

Air Ҹ (l/min)

ü (l/hr)

0.1

12.0

2.5

0.2

19.0

3.1

0.3

25.0

3.8

0.4

32.0

4.3

0.5

39.0

4.7



• Liquid Pump : ũ

• Motor : 5 stepping ȸ

• Tank Material : SUS

• Tank capacity : 3

• Tank & Tank 1EA

• Liquid Supply Line : з°, Ʈ, 巹ι

• Control : Main System

























3.

4. ڵ LOADING & UNLOADING ý


• Control Display : LCD Touch Display (10ġ ġ÷ )

• Material : SUS, AL( ǥó), Steel(Powder Coating)

• ġ, ġ ġ

• 2ü ý (кл )

• ý

• Spray pressure control : Digital Display

• Liquid Tank : Tank , Tank capacity (3) , Material : SUS

• : Magnetic Drive Gear Pump (Air )

• ̻̳ ġ ȮSystem ( Lamp Alarm System)

• Ⱑ, Damperġ

• Vacuum substrate & Heating Plate

Plate Dimensions : 6ġ

Plate Material : Ȳ

Temp. Range : + ~ max 400

Plate size : 400mm(W) 500mm(L)

• ڵ LOADING & UNLOADING ý

Cassette

Glass ڵ LOADING ý Coating Zone ڵ ̼

Loading Gate Valve ڵ

ڵ UNLOADING ý - Coating Zone ڵ UNLOADING















































5.